Blazed Grating

This is a variation of the example for a 1D periodic line grating Line Grating. It is inspired by blazed gratings. As in the case of the 1D line, the periodic unit cell contains the 2D cross-section through the grating. Here the cross-section contains two triangular shapes with different widths, heights and angles. These triangular lines are situated on a substrate and surrounded by a background material. The materials in the example are chosen as chrome (line), glass (substrate) and air (background).


The grating is illuminated by plane waves with s and p polarization. JCMsuite computes the near field distributions. The following figures show the near-field intensities within the structure for perpendicular plane wave incidence from the substrate side at a wavelength of 193\mathrm{nm}.


Near field intensity for s-polarized illumination


Near field intensity for p-polarized illumination

The post process FourierTransform computes the amplitudes of the transmitted diffraction orders.

Parameter scan

The Matlab® script data_analysis/run_scan_illumination.m provides a scan over the incidence angle at fixed grating height and angle. It produces the following plots showing the intensities for reflected and transmitted diffraction orders:


In the script data_analysis/run_scan_height.m the height of one of the triangular lines is varied from 50 \mathrm{nm} to 120 \mathrm{nm} at a fixed illumination angle. This yields the following height dependencies: