Square Unit Cell

This is a simple example of a 2D grating with a twofold periodic square lattice. The 3D unit cell is periodic in x- and y- direction. It contains a rhomboid (parallelepiped) situated on a substrate and surrounded by a background material. The materials in the example are chosen as chrome (rhomboid), glass (substrate) and air (background).


The grating is illuminated by plane waves with s and p polarization. JCMsuite computes the near field distributions. The following figures show the near-field intensities within the structure for perpendicular plane wave incidence from the substrate side at a wavelength of 193\mathrm{nm}.


Field vectors for s-polarized illumination


Field vectors for p-polarized illumination

The post process FourierTransform computes the amplitudes of the transmitted diffraction orders.

Parameter scan

The Matlab® script data_analysis/run_scan_illumination.m provides a scan over the incidence angle. It produces the following plots showing the intensities for reflected and transmitted diffraction orders:


In the script data_analysis/run_scan_width.m the width of the pattern varies from 150 \mathrm{nm} to 250 \mathrm{nm} with fixed illumination angle. This yields the following dependencies: